Pneumatic Driven Positioning and Alignment System for the Assembly of Hybrid Microsystems

Micro assembly is typically characterized by positioning tolerances below a few micrometers. In the case of the assembly of hybrid micro systems, such as optical systems, micro ball lenses or micro probes for measurement tasks, even positioning accuracies in the sub-micrometer range have to be achieved. The efficiency of the use of automated handling devices is strongly influenced by the flexibility of the equipment and the required application specific customizations. In this context a high precision assembly head is presented. It upgrades conventional robots with the ability to do fine alignment steps in sub-micrometer resolution and 6 DOF. Therefore it is equipped with a universal endeffector structure.